Vacuum Gauge Calibration

Scope:

This ARP addresses the general procedure for the best practices for minimizing uncertainty when calibrating thermal conductivity and cold cathode vacuum gauges, which includes the vacuum sensor(s) and accompanying electronics necessary for a pressure measurement to be made. It also includes the best practices for an in process verification where limitations make it impossible to follow the best practices for minimizing uncertainty.

Rationale:

An industry standard is needed for vacuum gauge calibration as there is no existing standard.

AKA:
  • SAE AMEC- -16
Sector:
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